•Gas mass flow controllers, mass flow meters •Liquid mass flow controllers, mass flow meters •Liquid vaporization units and systems •Heat exchanger units, heat exchanger systems

•HX-10A Compact, high efficiency heat exchangers •Clean,all metal structure •316L stainless steal used for surface exposed to gas •Built-in thermal switch to detect overheating • Built-in thermocouple •Compact size •Maximum operating temperature of 200°C • Exhaust line blockage prevention on semiconductor and liquid crystal manufacturing systems (generation of hot N2) • Process gas heating • Carrier gas heating for liquid vaporizer units • Bubbling gas heating • Cryopump regeneration • Removal of moisture from the inside of process chambers

•Example of an application to a liquid crystal manufacturing etching system exhaust line.
An HX heat exchanger unit was placed part way along the exhaust line and heated nitrogen gas injected.
A 2-month running test was carried out and the results compared with the use of tape heaters only

Results after use of tape heaters only	Results after use of the HX heat exchanger unit