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Specifications
| Model |
Dsub9pin |
MC-3102E-NO
MC-3102E-NC |
MC-3202E-NO
MC-3202E-NC |
Range (Full scale) N2
equivalent |
10, 20, 30, 50, 100, 200, 300, 500SCCM
1, 2, 3, 5SLM |
10, 20SLM |
| Valve operation mode |
Normally open valve NO
Normally closed valve NC |
| Surface polishing |
Optional |
| Minimum controllable flow rate |
2%F. S. |
| Analog flow rate output |
0-5V DC (Proportional to flow rate) |
| Analog flow rate command |
0-5V DC (Proportional to flow rate) |
| Accuracy |
±1%F. S. |
| Linearity |
±0.5%F. S. |
| Repeatability |
±0.2%F. S. |
| Response time |
1sec (typical) |
| Required differential pressure |
49~294kPa |
98~294kPa(10SLM)
147~294kPa(20SLM) |
| Withstand pressure |
980kPa |
Temperature
coefficient |
Zero |
±0.02%F. S. /°C |
| Span |
±0.02%F. S. /°C |
| Operation temperature |
15-50°C |
| Leak integrity |
1x10-11Pa·m3
/ sec He |
| Materials exposed to gas |
Stainless steel 316L, PCTFE, Au |
| Control valve actuator |
Piezo electric actuator |
 |
| Standard fittings |
6.35mmVCR compatible |
|
| Power supply requirements |
+15V:120mA -15V:100mA |
| Digital interface |
RS232C, RS485 |
|
| Alarm output |
Open collector transistor output |
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