MC-4102MO
MC-4102MC

MC-4202MO
MC-4202MC

MC-4252MO

Range (Full scale) N2 equivalent

5, 10, 20, 30, 50,
100, 200, 300, 500SCCM
1, 2, 3, 5SLM

10, 20SLM

50SLM

Valve operation mode

Normally open valve: MO
Normally closed valve: MC

Normally open valve

Surface polishing

LEP

Minimum controllable flow rate

2%F. S.

Analog flow rate output

0-5V DC (proportional to flow rate)

Analog flow rate command

0-5V DC (proportional to flow rate)

Accuracy

±0.5%F.S.

±0.75%F.S.

±1%F.S.

Linearity

±0.5%F. S.

Repeatability

±0.2%F. S.

Response time

1 second typical

Required differential pressure

49~294kPa

98~294kPa (10SLM)
147~294kPa (20SLM)

98~294kPa (50SLM)

Withstand pressure

980kPa

Temperature coefficient

zero

±0.02%F. S. /°C

span

±0.02%F. S. /°C

±0.04%F. S. /°C

±0.08%F. S. /°C

Operation temperature

0~50°C

Leak integrity

1Ž×10^-11Pa·m³ / sec He

Materials exposed to gas

SS-316L, PCTFE, Au (Pt)

Control valve actuator

Piezo electric actuator

Standard fittings

6.35mmVCR compatible

Power supply requirements

+15V: 120mA, -15V: 100mA

Digital interfaces

RS232C, RS485