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The MC-5000L series is divided into the MC-5100L, MC-5200L and MC-5250L according to differences in full scale ranges. They respectively have normally open or normally closed valve actuators.

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Specifications

Model		MC-5100L-MO MC-5100L-MC	MC-5200L-MO MC-5200L-MC	MC-5250L-MO MC-5250L-MC
Standard flow rate in nitogen (Full scale)		5, 10, 20, 30, 50, 100, 200, 300, 500SCCM 1, 2, 3, 5SLM	10, 20SLM	50SLM
Valve operation mode		-MO:Normally open valve -MC:Normally closed valve
Surface polishing		Precision polishing
Minimum controllable flow rate		2%F. S.
Accuracy		100F.S.to 25%F.S. ±1.0%S.P. 25%F.S. to 2%F.S. ±0.25%F.S.
Repeatability		±0.2%F.S.
Response time		1 second typical
Maximum operating pressure		300kPa(G)
Operating differntial pressure		50 to 300kPa(G)	-MO,-NO 50 to 300kPa(10SLM) 100 to 300kPa(20SLM) -MC,-NC 100 to 300kPa(10SLM) 200 to 300kPa(20SLM)	100 to 300kPa(30SLM) 150 to 300kPa(50SLM)
Withstand pressure		980kPa
Temperature coefficient	zero	±0.02%F. S. /°C
	span	±0.02%F. S. /°C	±0.04%F. S. /°C	±0.08%F. S. /°C
Operation temperature		5 to 50°C
Leak integrity		1x10^-11Pa·m³ / sec He
Materials exposed by gas		SS-316L, PCTFE, Au (Pt)
Control valve actuator		Piezo electric actuator
Standard fitting		6.35mmVCR compatible
Power supply requirement		11 to 25VDC (5VA max.)
Digital interface		DeviceNet　(SEMI E54 and ODVA SEMI SIG MFC profile)

Dimensions

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