MC-5100MO
MC-5100MC

MC-5200MO
MC-5200MC

MC-5250MO

Range (Full scale) N2 equivalent

5, 10, 20, 30, 50,
100, 200, 300, 500SCCM
1, 2, 3, 5SLM

10, 20SLM

50SLM

Valve operation mode

Normally open valve: MO
Normally closed valve: MC

Normally open valve

Surface polishing

Minimum controllable flow rate

2%F. S.

Accuracy

ｱ(0.25%SP+0.25%F.S.)

ｱ(0.45%SP+0.25%F.S.)

ｱ(0.75%SP+0.25%F.S.)

ｱ0.5%F. S.

Repeatability

ｱ0.15%F. S.

Response time

1 second typical

Required differential pressure

49~294kPa

98~294kPa (10SLM)
147~294kPa (20SLM)

98~294kPa (50SLM)

Withstand pressure

980kPa

Temperature coefficient

zero

ｱ0.02%F. S./°C

span

ｱ0.02%F. S./°C

ｱ0.04%F. S./°C

ｱ0.08%F. S./°C

Operation temperature

0~50°C

Leak integrity

1ﾗ10^-11Pa·m³ / sec He

Materials exposed by gas

SS-316L, PCTFE, Au (Pt)

Control valve actuator

Piezo electric actuator

Standard fitting

6.35mmVCR compatible

Power supply requirement

11~25VDC (5VA max.)

Digital interface

DeviceNet　(SEMI E54 and ODVA SEMI SIG MFC profile)