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The MM-3100E, 3200E is a new highly functional mass flow meter, which has retained the diverse functions the MC-3000E series possesses. Used in combination with mass flow controllers considerable improvements in reliability can be made.

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Specifications

Model		MM-3102E	MM-3202E
Flow rate range		5SCCM~5SLM	10, 20SLM
Response time (0 to 98%F.S.)		1sec (typical)
Accuracy		±1%F. S.
Linearity		±0.5%F. S.
Repeatability		±0.2%F. S.
Withstand pressure		980kPa
Operation temperature		0~50°C
Temperature coefficient	Zero point	±0.02%F. S./°C
	Span	±0.02%F. S./°C
Pressure coefficient		0.001%F. S./kPa
Leak integrity		1x10^-11Pa·m³/ sec
Materials exposed to gases	Body	SUS-316L
	Seals	Au
Standard fittings		6.35mm VCR Male
Flow rate output signal		0~5V (proportional to flow rate)
Set output signal		0~5V (proportional to flow rate)
Alarm output		Open collector transistor output
Digital interface		RS-232C or RS-485 conformity
Power supply requirements		+15V 70mA, -15V 70mA
Mounting direction		Free

Dimensions

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