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• Product line |
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>> Liquid vaporization supply systems(ferro-electrics,High-K,Low-K)
>> Liquid mass flow controllers,mass flow meters,vaporizer units
(Liquid mass flow controllers/meters,acid resistant mass flow meters,liquid control,vaporization and supply units)）
>> Gas mass flow controllers,mass flow meters
>> Heat exchaner units,heat-exchanging systems
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LINTEC is not only a planning and development lab but also a technological group where the entire process of designing, production, and inspection for quality assurance is consolidated.
High reliability of LINTEC products comes from these environments. Manufacturing
of such vital parts as sensors, assembling of mass-flow controller, and
alignment of the final products are all performed in-house to aquire cumulative
know-how. Production of general parts is sublet to associated corporations.
A computerized automatic adjustment line provides improved reliability
to LINTEC products.
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LIQUID VAPORIZATION SYSTEM
For ferro-electric, High-K & Low-K materials
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LVS series |
Liquid vaporaization system |
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Features
• Vaporization and supply of ferro-electric materials such as PZT,BST etc. possible
• Equipped with liquid mass flow meters and high efficiency vaporizer units
• Vaporization and supply of Low-K and High-K materials
• A wide range of specifications can be met(Please inquire) |
Applications
• Ferro-electric CVD
• High-K,Low-K material CVD
• Vaporization and supply of a wide range of liquids |
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LSS series |
Automatic liquid supply system |
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Features
• 6 line automatic supply
• Employment of a continuous automatic supply method
• 2 tank switching method,allowing for tank changing while the system is in operation
• A wide range of liquids can be used (TEOS,TiCL4,TEB,TEPO etc.) |
Applications
• Automatic liquid supply to CVD system sub tanks
• Automatic liquid supply to a wide range of liquid tanks |
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LIQUID MASS FLOW METERS / CONTROLLERS
VAPORIZERS
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LM-2100A series |
Digital liquid mass flow meters |
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Features
• High performance (metal seal, digital, high accuracy,)
• Combined with the flow rate control valve CV series, high precision liquid flow rate control is possible.
• In addition, combination with LINTEC’s original vaporizer VU series makes high precision and high speed vaporization possible. |
Applications
• Measurement of a wide range of liquids.
• Flow rate control of a wide range of liquids when used in combination
with flow rate control valve CV series.
• Flow rate control and vaporization when used in combination with vaporizers. |
>>Liquid mass flow meter LM-2100 details
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AM-3000 series |
Metal-free strong acid digital mass flow meters |
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Features
• The AM-3102 is a liquid mass flow meter, which has realized very small flow rate measurement of HF and other strongly acidic as well as strongly alkaline liquids.
• No metal used in the liquid contact materials resulting in fewer metal contamination problems.
• Straight liquid flow path construction giving the smallest dead volume possible. |
Applications
• Flow rate measurement of acids, all types of alkaline solutions, organic solvents, solutions of organic compounds, high purity water etc.
• Applications where metal contamination must be kept to a minimum.
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VAPORIZER VU series |
Liquid vaporizers |
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Features
• Vaporizers can control and vaporize a wide range of liquids efficiently
by combination with the liquid mass flow meter LM-2100.
• The most appropriate vaporizer model can be selected according to
the type of liquid and process condition. |
Classes
• Ferro-electric materials;VU-510,VU-550
• General purpose;VU-450
• Low-K, High-K materials; VU-410,VU-420,VU-425
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>>Vaporizer details
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GAS MASS FLOW CONTROLLERS / METERS
Patented ambient temperature compensated flow sensor (U.S. and Japan)
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MC-5000 series |
DeviceNet interface digital mass flow controllers |
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Features
• DeviceNet (ODVA) digital interface MFC
• High performance (metal seal,piezo valve, high accuracy, multi gas)
• +24V single power operation
• Surface mount interface |
>>Mass flow controller
MC-5000 details |
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MC-4000 series |
High performance digital mass flow controllers |
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Features
• High performance 1.125 inch digital MFC (metal seal, piezo valve,
high accuracy and digital control)
• RS232C and RS485 digital interfaces (on-board jumper selection)
• Surface mounting option available (SEMI STD.) |
>>Mass flow contoroller
MC-4000 details |
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MC-3000E series |
Low COO digital mass flow controllers |
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Features
• High performance digital MFC with low cost of ownership (metal seal,piezo valve & high accuracy)
• Compact body size (106mm,1/4VCR)
• Surface mounting option available (SEMI Std. 79.8mm or 92mm)
• RS232C and RS485 digital interfaces (on-board jumper selection) |
>>Mass flow controller
MC-3000E details |
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MM-3000E series |
Low COO digital mass flow meters |
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Features
• Low pressure drop.
• Compact body size (106mm,1/4VCR)
• High performance digital MFM with low cost of ownership (metal seal & high accuracy) |
Applications
• Flow rate measurements of corrosive gases
• Leak tester
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>>Mass flow meter
MM-3000E detail |
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MC-2000 series |
Multipurpose digital mass flow controllers |
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Features
• Wide range of full scale flow rates (1sccmF.S. - 200slmF.S.)
• Surface mounting option available (SEMI STD.)
• High performance digital MFC (metal seal, piezo valve, high accuracy
and digital control) |
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MC-1100TC series |
High temperature mass flow controllers |
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Features
• Maximum operating temperature 120°C
• Maximum baking temperature 150°C
• Built in high reliability solenoid actuator
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COMPACT HEAT EXCHANGERS
Vaporizer technology
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HX-10A |
Efficient,compact heat exchanger |
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Features
• Clean, all metal structure (316L stainless steal)
• Compact size
• Maximum operating temperature of 200°C
• Efficient heat exchange of gases at 50L/min |
Applications
• Exhaust line blockage prevention on semiconductor and LCD manufacturing sysytems
• Process gas heating |
>>Heat exchanger HX-10A details
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HX-101 |
High flow rate, compact heat exchanger |
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Features
• Efficient heat exchange of gases at 300L/min (L300)
• Clean, all metal structure (316L stainless steal)
• Compact size
• Maximum operating temperature of 300°C |
Applications
• Exhaust line blockage prevention on semiconductor and LCD manufacturing
sysytems
• Process gas heating |
>>Heat exchanger HX-101 details
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