CVD Materials and LINTEC Vaporization Technology Categories Applications Thin Films Materials Liquid Mass Flow Meter Vaporizers Dielectrics Passivation, Capacitors SiO2 TEOS LM-2100 VU-108 VU-110 VU-301 Si3N4 TEOS BPSG TEOS, TEB, TEPO High-k Films Capacitors Ta2O5 Ta(OC2H5)5 LM-2100 VU-301 VU-410 VU-510 High-k Films (Ferroelectrics) Capacitors BST Ba(DPM)2 LM-2100 VU-510 Ba(METHD)2 Sr(DPM)2 Sr(METHD)2 Ti(O-iPr)2(DPM)2 Ti(O-tBu)2(DPM)2 PZT Pb(DPM)2 LM-2100 VU-510 Zr(O-tBu)4 Ti(O-iPr)2(DPM)2 SBT Sr[Ta(OEt)6]2 LM-2100 VU-510 Bi(CH3)3 Metal Films Interconnect Metals Cu Cu(hfac)tmvs LM-2100 VU-410 VU-510 Cu-ATMS Electrodes Ru Ru(EtCp)2 LM-2100 VU-410 VU-510 Ru(OD)3 Barrier Metals TiN TiCl4, TDMAT, TDEAT LM-2100 VU-301 VU-410 VU-510 TaN Ta(Et2N)4, Ta(Me2N)5 Low-k Films Inter-layer Dielectrics Various Various LM-2100 VU-108 VU-301 VU-110 VU-410 VU-510 Download of the VU-410 / VU-510 PDF catalogs is available. Get the Acrobat Reader if you need it. >>Catalog Data (428kB) >>Contact us. Specifications Item Specifications Valves Control valve for precursor CV-P Diaphragm solenoid valve, normally closed Shut-off valve AV Diaphragm pneumatic valve, normally closed Thermocouple K type Maximum operating temperature 200°C Standard fittings Precursor inlet Carrier gas inlet Vapor outlet 3.2mm VCR Male 6.35mm VCR Male 6.35mm VCR Female Power supply Inner block Outer block One 100V 52.08W heater Two 100V 34.72W heaters (All heaters connected in parallel) Recommended temperature regulation method P. W. M. P. I. D. control (less than one second per cycle) Pneumatic actuator operating pressure 490-588 kPa(G) Materials exposed to gases and liquids SUS, Au, Ni-Co, polyimide Mounting direction Free Standard accessories Valve cable Between LM and VU CC-LV-3-3M Connector Plug for Thermocouple CMP01-K (RKC) Connector Straight plug for heater and thermostat SRCN6A13-5S (JAE) Dimensions >>Catalog Data (240kB) >>Contact us. Specifications Item Specifications Valve Control valve for precursor CV-P Diaphragm, Solenoid, Normally closed Control valve for solvent CV-S Diaphragm, Solenoid, Normally closed Shut-off valve AV Diaphragm, Pneumatic, Normally closed Heater Outer block HR-1 120V, 100W, 4 units, Total 400W Inner block HR-2 120V, 100W, 2 units, Total 200W Thermocouple Outer block TC1 Type K (CA) Inner block TC2 Type K (CA) Thermostat Selectable by temperature High temperature Open at 350°C Medium temperature Open at 200°C Operating temperature With PID controller Room temperature to 300°C Fittings Valve unit AV inlet 6.35mm VCR male CV-P inlet 3.2mm VCR female CV-S inlet 3.2mm VCR female AV drive gas inlet 3.2mm OD quick tube connector Air or N2, Pressure;440-690kPaG Inner block Vapor outlet 12.7mm VCR female Materials exposed to gases/liquids Vaporizer unit SS316L, Au Valve unit SS316L, Au, Polyimide Dimensions Outer case H275mm, W160mm, D143mm Mounting direction Vertical at vapor outlet down Environmental temperature 25°C±15°C Outer case temperature Less than 80°C with 300°C at vaporizer unit Weight 8 kg Accessories Interconnecting cable LM2100A to VU-510 3m, 2 pieces (for CV-P and CV-S) Connector JAE SRCN6A-16-7S 1 piece (for heaters and thermostat) Connector RKC CMP01-K 2 pieces (for thermocouple) Applications Precursor Precursor Vapor Pressure torr(@ temp) Vaporizer Temp. (°C) Carrier Gas Flow (SCCM) Flow Rate g/min Cocktail Ba(thd)2PMDETA&Sr(thd)2PMDETA 0.1(240) 290 N2 200 0.514 Sr(DPM)2 2(300) 280~300 N2 100~300 0.300 Ti(O-C3H7)2(thd)2 220(250) 250 N2 200 0.977 Ti(O-ipu)2(DPM)2 4(250) 250 Ar 200 1.000 Ti(O-tBu)2(DPM)2 4(250) 250 Ar 200 1.000 Ru(EtCp)2 9.6(150) 150 N2 200 0.910 Ru(EtCp)2 9.6(150) 150 N2 200 0.238 Ru(EtCp)2 3.5(130) 130 Ar 200 3.570 Ru(OD)3 1.0(200) 200 N2 100 0.050 Ta(OC2H5)5 2.5(170) 170 N2 200 0.200 Dimensions
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