■Features
□Precise flow rate control and efficient vaporization of liquids (TEOS, TEB, TEPO, etc.) when used in combination with the LM-2102P, LM-2202P and LM-3102E liquid mass flow meters.
□Applicable to vacuum process and atmospheric process.
□Maximum operating temperature of 160°C.
□Piezo control valve provides fast and precise control.
□Compact body size.

■Features
□Precise flow rate control and efficient vaporization of a wide variety of liquids when used in combination with the LM-2100A liquid mass flow meter (US PAT. 5372754).
□Applicable not only to vacuum but also atmospheric processes.
□Maximum operating temperature of 200°C.
□WCompact body size (compatible with VU-410/420).
□Wide range of carrier gas flow rates (50SCCM-4SLM).
(50SCCM〜4SLM)

■Features
□Precise flow rate control and efficient vaporization of a wide variety of liquids when used in combination with the LM-2100A liquid mass flow meter (US PAT. 5372754).
□Atmospheric vaporization and supply of pure water.
□Wide range of carrier gas flow rates (1SLM-100SLM)
□Maximum operating temperature of 200°C

■Features
□Premix vaporization technology (patent pending).
□Precise flow rate control and premixing of up to
3 precursors using LM-2100A liquid mass flow meters.
□Simultaneous vaporization in one vaporizer chamber.
□Space savings and lower cost of ownership.
□Atmospheric and vacuum process capabilities.
□Wide carrier gas flow range (800SCCM-130SLM).
(800SCCM〜130SLM)
□Maximum operating temperature of 200°C.

■Features
□Premix vaporization technology (patent pending).
□Precise flow rate control and premixing of up to
4 precursors using LM-2100A liquid mass flow meters.
□Simultaneous vaporization in one vaporizer chamber.
□Space savings and lower cost of ownership.
□Atmospheric and vacuum process capabilities.
□Wide carrier gas flow range (800SCCM-130SLM).
(800SCCM〜130SLM)
□Maximum operating temperature of 300°C.